| Input: | |
| In x Se 1-x bilayer thin films of the same thickness (2500 Å) and different thickness ratios (x 0.25, 0.50, and 0.75) were deposited by the thermal evaporation method on a clean glass substrate under a vacuum of 10 -6 mbar. The structural, electrical, and optical measurements of the films were carried on to investigate the effect of annealing temperature and thickness ratio. Prepared bilayer films were also annealed at substrate temperatures of 70 °C and 100 °C. e thin films were prepared using the thermal evaporation coating unit shown in Figure 1. | |
| Output: | |
| [ | |
| { | |
| "label": "InSe_thickness_ratio_and_annealing", | |
| "@graph": [ | |
| { | |
| "@type": "Entity", | |
| "@id": "e1", | |
| "type": [{ "@value": "material" }], | |
| "label": [{ "@value": "In" }] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e2", | |
| "type": [{ "@value": "material" }], | |
| "label": [{ "@value": "Se" }] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e3", | |
| "type": [{ "@value": "material" }], | |
| "label": [{ "@value": "clean glass substrate" }] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e6", | |
| "type": [{ "@value": "tool" }], | |
| "label": [{ "@value": "thermal evaporation coating unit" }] | |
| }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a1", | |
| "label": [{ "@value": "thermal evaporation" }], | |
| "matprov:atmosphere": [{ "@value": "vacuum" }], | |
| "matprov:pressure": [{ "@value": "10⁻⁶ mbar" }] | |
| }, | |
| { "@type": "Usage", "activity": "a1", "entity": "e1" }, | |
| { "@type": "Usage", "activity": "a1", "entity": "e2" }, | |
| { "@type": "Usage", "activity": "a1", "entity": "e3" }, | |
| { "@type": "Usage", "activity": "a1", "entity": "e6" }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e4", | |
| "type": [{ "@value": "material" }], | |
| "label": [{ "@value": "thermal evaporated sample" }], | |
| "matprov:length_thickness": [{ "@value": "2500 Å" }], | |
| "matprov:form": [{ "@value": "bilayer thin film" }] | |
| }, | |
| { "@type": "Generation", "activity": "a1", "entity": "e4" }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a2", | |
| "label": [{ "@value": "annealing" }], | |
| "matprov:temperature": [{ "@value": "70, 100 °C" }] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e5", | |
| "type": [{ "@value": "material" }], | |
| "label": [{ "@value": "annealed sample" }] | |
| }, | |
| { "@type": "Usage", "activity": "a2", "entity": "e4" }, | |
| { "@type": "Generation", "activity": "a2", "entity": "e5" } | |
| ] | |
| } | |
| ] |